Patent Assignment
Reel/Frame 028511/0425
Assignment of Assignor's Interest
Recorded: 2012-07-09
Pages: 3
Assignors
CHEN, HUI
Executed: 2012-06-21
D'AMBRA, ALLEN L.
Executed: 2012-06-06
ATKINSON, JIM
Executed: 2012-06-07
CHEN, HUNG
Executed: 2012-06-08
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Methods and Apparatus for Pre-Chemical Mechanical Planarization Buffing Module