Assignment of Assignor's Interest

Recorded: 2012-07-09 Pages: 5

Assignors

TANAKA, KEISUKE

Executed: 2012-07-02

MORIYA, MACHI

Executed: 2012-07-01

Assignee

TOKYO ELECTRON LIMITED

3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN

Covered Property (1)

Method of Manufacturing Semiconductor Device and System for Manufacturing Semiconductor Device

Patent: 8,853,087 →

Application: 13/518,977 →

Publication: US 2012/0282713