Patent Assignment
Reel/Frame 028543/0385
Assignment of Assignor's Interest
Recorded: 2012-07-13
Pages: 4
Assignors
MOROI, MASAYUKI
Executed: 2012-07-13
KIKUCHI, HITOSHI
Executed: 2012-07-13
KOAKUTSU, MASATO
Executed: 2012-07-13
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Temperature Measurement Apparatus, Method of Estimating Temperature Profile, Recording Medium and Heat Treatment Apparatus