Patent Assignment
Reel/Frame 028546/0049
Assignment of Assignor's Interest
Recorded: 2012-07-13
Pages: 3
Assignors
MOTOSHIMA, YASUYUKI
Executed: 2012-06-04
MARUYAMA, TORU
Executed: 2012-06-04
MATSUO, HISANORI
Executed: 2012-06-04
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU,, TOKYO, JAPAN
Covered Property
(1)
Method and Apparatus for Polishing a Substrate