Patent Assignment
Reel/Frame 028620/0251
Assignment of Assignor's Interest
Recorded: 2012-07-19
Pages: 2
Assignors
KOSUGI, TETSUYA
Executed: 2012-07-10
UENO, MASAAKI
Executed: 2012-07-11
YAMAGUCHI, HIDETO
Executed: 2012-07-12
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO 1018980, JAPAN
Covered Property
(1)
Temperature Detecting Apparatus, Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.