Patent Assignment
Reel/Frame 028654/0597
Assignment of Assignor's Interest
Recorded: 2012-07-27
Pages: 3
Assignors
KAKIMOTO, AKINOBU
Executed: 2012-07-20
TAKAGI, SATOSHI
Executed: 2012-07-20
IGARASHI, KAZUMASA
Executed: 2012-07-20
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method and Apparatus for Forming Amorphous Silicon Film