Patent Assignment
Reel/Frame 028688/0949
Assignment of Assignor's Interest
Recorded: 2012-07-31
Pages: 5
Assignors
GODET, LUDOVIC
Executed: 2012-05-22
LU, XIANFENG
Executed: 2012-05-29
RAMAPPA, DEEPAK A.
Executed: 2012-05-23
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Method and System for Ion-Assisted Processing
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.