Patent Assignment
Reel/Frame 028705/0314
Assignment of Assignor's Interest
Recorded: 2012-08-02
Pages: 2
Assignor
KANEKO, TOMOHIRO
Executed: 2012-07-31
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Substrate Processing Method and Storage Medium