Patent Assignment
Reel/Frame 028723/0304
Assignment of Assignor's Interest
Recorded: 2012-08-03
Pages: 3
Assignors
TAKAHASHI, KIICHI
Executed: 2012-07-20
KAMADA, TERUMI
Executed: 2012-07-20
OIKAWA, ITTETSU
Executed: 2012-07-20
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Heat Treatment Apparatus and Method of Transferring Substrates to the Same