Patent Assignment
Reel/Frame 028776/0128
Assignment of Assignor's Interest
Recorded: 2012-08-13
Pages: 3
Assignors
WARNAAR, PATRICK
Executed: 2012-07-17
VAN SCHIJNDEL, MARK
Executed: 2012-07-09
KUBIS, MICHAEL
Executed: 2012-07-09
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Metrology Method and Apparatus, and Device Manufacturing Method