Patent Assignment
Reel/Frame 028790/0700
Assignment of Assignor's Interest
Recorded: 2012-08-15
Pages: 8
Assignors
LAVOIE, ADRIEN
Executed: 2012-02-24
SALY, MARK
Executed: 2012-02-24
MOSER, DANIEL
Executed: 2012-02-27
ODEDRA, RAJESH
Executed: 2012-02-27
KANJOLIA, RAVI
Executed: 2012-02-27
Assignee
NOVELLUS SYSTEMS, INC.
4000 N. FIRST STREET, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Method of Plasma Activated Deposition of a Conformal Film on a Substrate Surface