Patent Assignment
Reel/Frame 028795/0403
Assignment of Assignor's Interest
Recorded: 2012-08-16
Pages: 3
Assignor
ITO, SHOZO
Executed: 2012-08-06
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, 107-6325, JAPAN
Covered Property
(1)
Film Forming Apparatus, Film Forming Method, Method for Optimizing Rotational Speed, and Storage Medium