Patent Assignment
Reel/Frame 028799/0198
Assignment of Assignor's Interest
Recorded: 2012-08-16
Pages: 3
Assignor
PEASE, JOHN
Executed: 2012-08-15
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
System and Method for Monitoring Temperatures of and Controlling Multiplexed Heater Array