Patent Assignment
Reel/Frame 028803/0119
Assignment of Assignor's Interest
Recorded: 2012-08-17
Pages: 4
Assignors
JENG, ESTHER
Executed: 2012-07-31
CHANDRASHEKAR, ANAND
Executed: 2012-07-31
HUMAYUN, RAASHINA
Executed: 2012-07-31
DANEK, MICHAL
Executed: 2012-07-31
POWELL, RONALD
Executed: 2012-07-07
Assignee
NOVELLUS SYSTEMS, INC.
4000 N. FIRST STREET, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Systems and Methods for Controlling Etch Selectivity of Various Materials