Patent Assignment
Reel/Frame 028846/0112
Assignment of Assignor's Interest
Recorded: 2012-08-24
Pages: 6
Assignees
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATOKU, 107-6325, JAPAN
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Numerical Aperture Integration for Optical Critical Dimension (Ocd) Metrology
Patent:
8,762,100 →
Application:
13/371,317 →
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.