Patent Assignment
Reel/Frame 028862/0075
Assignment of Assignor's Interest
Recorded: 2012-08-28
Pages: 4
Assignors
FENG, HANYING
Executed: 2012-08-01
CAO, YU
Executed: 2012-07-26
YE, JUN
Executed: 2012-07-26
ZHANG, YOUPING
Executed: 2012-07-24
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Methods and Systems for Pattern Design with Tailored Response to Wavefront Aberration