Patent Assignment
Reel/Frame 028873/0635
Assignment of Assignor's Interest
Recorded: 2012-08-30
Pages: 3
Assignor
SCHONLEBER, MARTIN, DR.
Executed: 2012-08-28
Assignee
PRECITEC OPTRONIK GMBH
RAIFFEISENSTRASSE 5, RODGAU, 63110, GERMANY
Covered Property
(1)
Apparatus and Method for Determining a Depth of a Region Having a High Aspect Ratio That Protrudes into a Surface of a Semiconductor Wafer
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.