Patent Assignment
Reel/Frame 028877/0797
Assignment of Assignor's Interest
Recorded: 2012-08-30
Pages: 4
Assignors
TAO, JUN
Executed: 2012-07-11
CHEN, BEEN-DER
Executed: 2012-07-10
LU, YEN-WEN
Executed: 2012-07-17
LI, JIANGWEI
Executed: 2012-07-24
TSAI, MIN-CHUN
Executed: 2012-07-16
MAO, DONG
Executed: 2012-07-10
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Method and Apparatus for Cost Function Based Simultaneous Opc and Sbar Optimization