Patent Assignment
Reel/Frame 028899/0461
Assignment of Assignor's Interest
Recorded: 2012-09-05
Pages: 3
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Semiconductor Processing Apparatus Including a Plurality of Reactors, and Method for Providing the Same with Process Gas