Patent Assignment
Reel/Frame 028917/0513
Assignment of Assignor's Interest
Recorded: 2012-09-07
Pages: 12
Assignors
ZHU, NANCHANG
Executed: 2012-06-21
SHAUGHNESSY, DERRICK
Executed: 2012-06-21
CHOUAIB, HOUSSAM
Executed: 2012-06-22
ZHENG, YAOLEI
Executed: 2012-07-05
YU, LU
Executed: 2012-07-05
CUI, JIANLI
Executed: 2012-07-05
AN, JIN
Executed: 2012-06-28
SHI, JIANOU
Executed: 2012-07-06
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
System and Method for Nondestructively Measuring Concentration and Thickness of Doped Semiconductor Layers