Patent Assignment
Reel/Frame 028941/0020
Assignment of Assignor's Interest
Recorded: 2012-09-07
Pages: 3
Assignee
SEMES CO., LTD.
#278, MOSI-RI, JIKSAN-EUP, SEOBUK-GU, CHEONAN-SI, CHUNGCHEONGNAM-DO, KOREA, REPUBLIC OF
Covered Property
(1)
Nozzle Unit, and Apparatus and Method for Treating Substrate with the Same