Patent Assignment
Reel/Frame 028944/0241
Assignment of Assignor's Interest
Recorded: 2012-09-12
Pages: 3
Assignors
HARA, MASAMICHI
Executed: 2012-08-31
YAMAMOTO, KAORU
Executed: 2012-08-31
GOMI, ATSUSHI
Executed: 2012-08-31
TAGA, SATOSHI
Executed: 2012-09-05
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Deposition Device