Patent Assignment
Reel/Frame 028944/0523
Assignment of Assignor's Interest
Recorded: 2012-09-12
Pages: 3
Assignors
ENOKIDA, SUGURU
Executed: 2012-08-27
NAKAHARADA, MASAHIRO
Executed: 2012-08-27
MIYATA, AKIRA
Executed: 2012-08-29
KIYAMA, HIDEKAZU
Executed: 2012-08-27
IIDA, NARUAKI
Executed: 2012-08-27
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Substrate Processing Method and Storage Medium