Patent Assignment
Reel/Frame 028952/0043
Assignment of Assignor's Interest
Recorded: 2012-09-13
Pages: 3
Assignors
SU, YEH-SHUO
Executed: 2012-06-01
XIAO, YING
Executed: 2012-06-01
LIN, CHIN-HSIANG
Executed: 2012-08-08
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. VI, HSINCHU SCIENCE PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Plasma Chamber Having an Upper Electrode Having Controllable Valves and a Method of Using the Same