Patent Assignment
Reel/Frame 028971/0980
Assignment of Assignor's Interest
Recorded: 2012-09-17
Pages: 6
Assignors
PORE, VILJAMI
Executed: 2012-08-15
HATANPAA, TIMO
Executed: 2012-08-15
RITALA, MIKKO
Executed: 2012-08-15
LESKELA, MARKKU
Executed: 2012-08-15
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Synthesis and Use of Precursors for Ald of Group Va Element Containing Thin Films