Patent Assignment
Reel/Frame 028978/0672
Assignment of Assignor's Interest
Recorded: 2012-09-18
Pages: 2
Assignors
CHEN, CHEN-YU
Executed: 2012-06-27
SHIEH, MING-FENG
Executed: 2012-06-27
CHANG, CHING-YU
Executed: 2012-06-27
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. VI, HSINCHU SCIENCE PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Overlay Mark and Method of Measuring the Same