Patent Assignment
Reel/Frame 028984/0874
Assignment of Assignor's Interest
Recorded: 2012-09-14
Pages: 4
Assignors
MORI, YOSHIHIRO
Executed: 2012-04-26
HAIBARA, TERUO
Executed: 2012-04-26
KUBO, ETSUKO
Executed: 2012-04-26
UCHIBE, MASASHI
Executed: 2012-04-26
Assignee
SILTRONIC AG
HANNS-SEIDEL-PLATZ 4, MUNICH, 81737, GERMANY
Covered Property
(1)
Cleaning Apparatus, Equipment, and Method
Application:
13/618,426 →
Publication:
US 2013/0192628