CLEANING APPARATUS, EQUIPMENT, AND METHOD
A cleaning apparatus for cleaning an object includes a cleaning tank holding a cleaning liquid, the object being cleanable by the cleaning liquid. A coupling tank holding an intermediate medium is in contact with a portion of the cleaning tank. An ultrasonic wave generation unit is disposed at the coupling tank and configured to ultrasonically vibrate the cleaning liquid via the intermediate medium. A modification unit is configured to modify a difference in sonic velocity between the cleaning liquid and the intermediate medium.
1 . A cleaning apparatus for cleaning an object comprising:
a cleaning tank holding a cleaning liquid, the object being cleanable by the cleaning liquid;
a coupling tank holding an intermediate medium that is in contact with a portion of the cleaning tank;
an ultrasonic wave generation unit disposed at the coupling tank and configured to ultrasonically vibrate the cleaning liquid via the intermediate medium; and
a modification unit configured to modify a difference in sonic velocity between the cleaning liquid and the intermediate medium.
2 . The cleaning apparatus according to claim 1 , wherein the modification unit includes a temperature adjustment unit configured to vary a temperature of the intermediate medium.
3 . The cleaning apparatus according to claim 2 , wherein the temperature adjustment unit includes a heating member disposed so as to heat the intermediate medium.
4 . The cleaning apparatus according to claim 2 , wherein the intermediate medium is degassed water and the temperature adjustment unit includes a flow rate adjustment unit configured to adjust an amount of the degassed water supplied to the coupling tank.
5 . The cleaning apparatus according to claim 1 , wherein the modification unit includes a composition adjustment unit configured to modify a composition of the intermediate medium.
6 . Cleaning equipment for cleaning an object, the cleaning equipment including a plurality of cleaning units, at least one of the cleaning units comprising:
a cleaning tank holding a cleaning liquid, the object being cleanable by the cleaning liquid;
a coupling tank holding an intermediate medium that is in contact with a portion of the cleaning tank;
an ultrasonic wave generation unit disposed at the coupling tank and configured to ultrasonically vibrate the cleaning liquid via the intermediate medium; and
a modification unit configured to modify a difference in sonic velocity between the cleaning liquid and the intermediate medium.
7 . A cleaning method for cleaning an object, the method comprising:
disposing the object in a cleaning liquid held in a cleaning tank; and
ultrasonically vibrating the cleaning liquid via an intermediate medium in contact with the cleaning tank, the step of ultrasonically vibrating including the steps of:
ultrasonically vibrating the cleaning liquid with a first difference between respective sonic velocities allowable in the cleaning liquid and the intermediate medium; and
ultrasonically vibrating the cleaning liquid with a second difference between the respective sonic velocities allowable in the cleaning liquid and the intermediate medium, the second difference being different from the first difference.
8 . The cleaning method according to claim 7 , wherein the ultrasonically vibrating the cleaning liquid via the intermediate medium includes modifying a temperature of the intermediate medium so as to change the first difference to the second difference in the respective sonic velocities.
9 . The cleaning method according to claim 8 , wherein the modifying the temperature is performed using a heating member.
10 . The cleaning method according to claim 8 , wherein the intermediate medium is degassed water and wherein the modifying the temperature includes varying a retention time of the degassed water being in contact with the cleaning tank.
11 . The cleaning method according to claim 7 , wherein the ultrasonically vibrating the cleaning liquid via the intermediate medium includes modifying a composition of the intermediate medium so as to change the first difference to the second difference in the respective sonic velocities.
12 . The cleaning method according to claim 11 , wherein the ultrasonically vibrating the cleaning liquid via the intermediate medium further comprises ultrasonically vibrating the cleaning liquid with a third difference between the respective sonic velocities allowable in the cleaning liquid and the intermediate medium, the third difference being different from the first difference and the second difference.
13 . A cleaning method for cleaning an object, the method comprising:
disposing the object in a first cleaning liquid held in a first cleaning tank;
ultrasonically vibrating the first cleaning liquid via a first intermediate medium in contact with the first cleaning tank;
disposing the object in a second cleaning liquid held in a second cleaning tank; and ultrasonically vibrating the second cleaning liquid via a second intermediate medium in contact with the second cleaning tank, the first cleaning liquid and the first intermediate medium allowing sonic velocities, respectively, having a first difference from each other, the second cleaning liquid and the second intermediate medium allowing sonic velocities, respectively, having a second difference from each other, the first and second differences being different from each other.
14 . The cleaning method according to claim 13 , further comprising adjusting a temperature of at least one of the first intermediate medium and the second intermediate medium so as to set the first difference and the second difference differently.
15 . The cleaning method according to claim 14 , wherein the adjusting the temperature is performed using a heating member.
16 . The cleaning method according to claim 14 , wherein the first intermediate medium is degassed water and wherein the adjusting the temperature includes modifying a retention time of the first intermediate medium being in contact with the first cleaning tank.
17 . The cleaning method according to claim 13 , wherein the first intermediate medium and the second intermediate medium have mutually different compositions.