Patent Assignment
Reel/Frame 028985/0910
Assignment of Assignor's Interest
Recorded: 2012-09-19
Pages: 4
Assignors
SUN, NOEL
Executed: 2012-09-12
SHEN, MEIHUA
Executed: 2012-09-12
GANI, NICOLAS
Executed: 2012-09-14
LIU, CHUNG NANG
Executed: 2012-09-18
MANI, RADHIKA C.
Executed: 2012-09-14
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Methods for in-Situ Chamber Clean Utilized in an Etching Processing Chamber