Patent Assignment
Reel/Frame 028987/0888
Assignment of Assignor's Interest
Recorded: 2012-09-19
Pages: 10
Assignors
MATSUMOTO, NAOKI
Executed: 2012-07-12
YOSHIKAWA, WATARU
Executed: 2012-07-19
YOSHIKAWA, JUN
Executed: 2012-07-06
MOYAMA, KAZUKI
Executed: 2012-07-06
ISHIBASHI, KIYOTAKA
Executed: 2012-07-06
MORITA, OSAMU
Executed: 2012-07-06
TANIKAWA, TAKEHIRO
Executed: 2012-07-06
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Antenna, Dielectric Window, Plasma Processing Apparatus and Plasma Processing Method