Patent Assignment
Reel/Frame 029012/0270
Assignment of Assignor's Interest
Recorded: 2012-09-24
Pages: 4
Assignors
ABURATANI, YUKINORI
Executed: 2012-09-03
SHIMADA, TOSHIYA
Executed: 2012-09-03
SHINOZAKI, KENJI
Executed: 2012-09-03
AMANO, TOMIHIRO
Executed: 2012-09-03
ASHIHARA, HIROSHI
Executed: 2012-09-03
YANAI, HIDEHIRO
Executed: 2012-09-03
MIYAKE, MASAHIRO
Executed: 2012-09-03
HIYAMA, SHIN
Executed: 2012-09-03
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.