Patent Assignment
Reel/Frame 029024/0339
Assignment of Assignor's Interest
Recorded: 2012-09-25
Pages: 3
Assignor
MAEDA, HIRONORI
Executed: 2012-05-11
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Detection Apparatus, Exposure Apparatus, Device Fabrication Method and Filter to Reduce a Difference Between Detected Intensity Values of Lights Having Different Wavelength Ranges