Patent Assignment
Reel/Frame 029035/0361
Assignment of Assignor's Interest
Recorded: 2012-09-27
Pages: 2
Assignors
HUDSON, ERIC A.
Executed: 2012-09-11
BAILEY, ANDREW D., III
Executed: 2012-09-11
DHINDSA, RAJINDER
Executed: 2012-09-11
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Plasma-Enhanced Etching in an Augmented Plasma Processing System