Patent Assignment
Reel/Frame 029035/0758
Assignment of Assignor's Interest
Recorded: 2012-09-27
Pages: 4
Assignors
KAWAMATA, MASAYA
Executed: 2012-07-09
HONDA, MASANOBU
Executed: 2012-07-09
KUBOTA, KAZUHIRO
Executed: 2012-07-09
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus