Patent Assignment
Reel/Frame 029041/0593
Assignment of Assignor's Interest
Recorded: 2012-09-28
Pages: 2
Assignor
KANARIK, KEREN JACOBS
Executed: 2012-08-02
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Mixed Mode Pulsing Etching in Plasma Processing Systems