Assignment of Assignor's Interest

Recorded: 2012-09-28 Pages: 2

Assignors

KITAGAWA, HIROAKI

Executed: 2012-09-25

MIYA, KATSUHIKO

Executed: 2012-09-26

Assignee

DAINIPPON SCREEN MFG. CO., LTD.

TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME,, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN

Covered Property (1)

Substrate Processing Apparatus and Substrate Processing Method

Patent: 9,111,966 →

Application: 13/630,833 →

Publication: US 2013/0074873

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.