Patent Assignment
Reel/Frame 029062/0213
Assignment of Assignor's Interest
Recorded: 2012-09-25
Pages: 4
Assignors
AKAE, NAONORI
Executed: 2012-09-10
MURAKAMI, KOTARO
Executed: 2012-09-10
HIROSE, YOSHIRO
Executed: 2012-09-10
KAMEDA, KENJI
Executed: 2012-09-10
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO 101-8980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.