Patent Assignment
Reel/Frame 029068/0123
Assignment of Assignor's Interest
Recorded: 2012-10-03
Pages: 3
Assignors
SUZUKI, AYUTA
Executed: 2012-08-06
KANG, SONGYUN
Executed: 2012-08-06
MORIYA, TSUYOSHI
Executed: 2012-08-06
TERASAWA, NOBUTOSHI
Executed: 2012-08-06
OKABE, YOSHIAKI
Executed: 2012-08-06
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Etching Method, Etching Apparatus, and Ring Member