Patent Assignment
Reel/Frame 029069/0707
Assignment of Assignor's Interest
Recorded: 2012-10-03
Pages: 3
Assignors
GUAN, YAN
Executed: 2012-10-01
MANOHAR, ABHISHEK
Executed: 2012-10-01
WANG, DEQI
Executed: 2012-10-01
CHEN, FENG
Executed: 2012-10-01
HUMAYUN, RAASHINA
Executed: 2012-10-01
Assignee
NOVELLUS SYSTEMS, INC.
4000 NORTH FIRST STREET, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Method for Depositing Tungsten Film with Low Roughness and Low Resistivity