Patent Assignment
Reel/Frame 029075/0574
Assignment of Assignor's Interest
Recorded: 2012-10-04
Pages: 4
Assignee
KLA-TENCOR CORPORATION
1 TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Dual-Lens-Gun Electron Beam Apparatus and Methods for High-Resolution Imaging with Both High and Low Beam Currents