Patent Assignment
Reel/Frame 029103/0620
Assignment of Assignor's Interest
Recorded: 2012-10-10
Pages: 5
Assignors
CHEN, FENG
Executed: 2012-09-26
YANG, TSUNG-HAN
Executed: 2012-09-26
GAO, JUWEN
Executed: 2012-09-25
DANEK, MICHAL
Executed: 2012-09-26
Assignee
NOVELLUS SYSTEMS, INC.
4000 NORTH FIRST STREET, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Methods of Improving Tungsten Contact Resistance in Small Critical Dimension Features