Patent Assignment
Reel/Frame 029111/0095
Assignment of Assignor's Interest
Recorded: 2012-10-11
Pages: 2
Assignor
TAKIMOTO, YUUJI
Executed: 2012-10-09
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Liquid Processing Apparatus, Liquid Processing Method and Storage Medium