Patent Assignment
Reel/Frame 029153/0684
Assignment of Assignor's Interest
Recorded: 2012-10-18
Pages: 3
Assignors
YOSHII, KOJI
Executed: 2012-10-15
YAMAGUCHI, TATSUYA
Executed: 2012-08-03
WANG, WENLING
Executed: 2012-10-05
SAITO, TAKANORI
Executed: 2012-10-15
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Temperature Control Method, Storage Medium Storing a Program Therefor, Temperature Control Apparatus, and Heat Treatment Apparatus