Patent Assignment
Reel/Frame 029158/0809
Assignment of Assignor's Interest
Recorded: 2012-10-19
Pages: 4
Assignors
CHANG, CHUN-WEI
Executed: 2012-08-31
WANG, CHIH-CHIEN
Executed: 2012-08-31
MO, WANG-PEN
Executed: 2012-08-31
HSIEH, HUNG-CHANG
Executed: 2012-09-03
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Method of Forming a Photoresist Layer