Patent Assignment
Reel/Frame 029160/0316
Assignment of Assignor's Interest
Recorded: 2012-10-19
Pages: 3
Assignor
DEN BOEF, ARIE JEFFREY
Executed: 2012-10-15
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Method and Apparatus for Determining an Overlay Error