Patent Assignment
Reel/Frame 029168/0858
Assignment of Assignor's Interest
Recorded: 2012-10-22
Pages: 3
Assignor
PILCH, KARL
Executed: 2012-08-26
Assignee
INFINEON TECHNOLOGIES AG
AM CAMPEON 1-12, NEUBIBERG, 85579, GERMANY
Covered Property
(1)
Etching Apparatus and Method