Patent Assignment
Reel/Frame 029171/0445
Assignment of Assignor's Interest
Recorded: 2012-10-23
Pages: 6
Assignors
FELDMANN, HEIKO
Executed: 2012-09-12
SOHMEN, ERIK MATTHIAS
Executed: 2012-09-13
STUEHLER, JOACHIM
Executed: 2012-09-13
GROMER, OSWALD
Executed: 2012-09-13
MUELLER, ULRICH
Executed: 2012-09-13
LAYH, MICHAEL
Executed: 2012-10-16
SCHWAB, MARKUS
Executed: 2012-09-13
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Illumination System and Projection Objective of a Mask Inspection Apparatus