Patent Assignment
Reel/Frame 029182/0666
Assignment of Assignor's Interest
Recorded: 2012-10-24
Pages: 4
Assignors
XIA, CHUNGUANG
Executed: 2012-10-15
CHANDRASEKHARAN, RAMESH
Executed: 2012-10-15
LEESER, KARL
Executed: 2012-10-15
KEIL, DOUGLAS
Executed: 2012-10-15
AUGUSTINYAK, EDWARD J
Executed: 2012-10-15
Assignee
NOVELLUS SYSTEMS, INC.
4000 N. FIRST STREET, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Suppression of Parasitic Deposition in a Substrate Processing System by Suppressing Precursor Flow and Plasma Outside of Substrate Region