Patent Assignment
Reel/Frame 029188/0272
Assignment of Assignor's Interest
Recorded: 2012-10-25
Pages: 3
Assignors
SAIDO, SHUHEI
Executed: 2012-10-12
YAMAGUCHI, TAKATOMO
Executed: 2012-10-12
HARA, DAISUKE
Executed: 2012-10-12
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.