Patent Assignment
Reel/Frame 029198/0661
Assignment of Assignor's Interest
Recorded: 2012-10-26
Pages: 3
Assignors
HATAKEYAMA, JUN
Executed: 2012-09-25
KATAYAMA, KAZUHIRO
Executed: 2012-09-25
OHSAWA, YOUICHI
Executed: 2012-09-25
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Patterning Process and Resist Composition